Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11572271 | Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer | Alessandro Faes, Joerg Siegert, Karl Tuttner | 2023-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11572271 | Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer | Alessandro Faes, Joerg Siegert, Karl Tuttner | 2023-02-07 |