Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11585711 | Capacitive pressure with Ti electrode | Willem Frederik Adrianus Besling, Remco Henricus Wilhelmus Pijnenburg, Kailash Vijayakumar, Jörg Siegert | 2023-02-21 |
| 11572271 | Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer | Sophie Guillemin, Joerg Siegert, Karl Tuttner | 2023-02-07 |