Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11714358 | Intelligent correction device control system for super-resolution lithography precision mask | Xiangang Luo, Mingbo Pu, Xiaoliang Ma, Xiong Li | 2023-08-01 |
| 11693320 | Secondary imaging optical lithography method and apparatus | Xiangang Luo, Changtao WANG, Yanqin WANG, Weijie Kong, Zeyu Zhao | 2023-07-04 |
| 11675273 | Method of fabricating micro-nano structure | Xiangang Luo, Yinghui Guo, Mingbo Pu, Xiong Li, Xiaoliang Ma | 2023-06-13 |
| 11623184 | Thin polymer membrane for treatment of saline water | Ping Sheng, Qiao GU, Qinghua Zhang, Jin Li, Runlai Li | 2023-04-11 |