Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693320 | Secondary imaging optical lithography method and apparatus | Xiangang Luo, Changtao WANG, Yanqin WANG, Ping Gao, Zeyu Zhao | 2023-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693320 | Secondary imaging optical lithography method and apparatus | Xiangang Luo, Changtao WANG, Yanqin WANG, Ping Gao, Zeyu Zhao | 2023-07-04 |