Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735437 | Apparatus and method for treating substrate | Boong Kim, Oh Jin Kwon, Joo Jib Park | 2023-08-22 |
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Dong-Hyub Lee, Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim +4 more | 2023-06-13 |