Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693315 | Photoacid generator, photoresist composition including the same, and method of preparing the photoacid generator | Eunkyung LEE, Sumin Kim, Hyunwoo KIM, Juhyeon Park, Giyoung SONG +6 more | 2023-07-04 |
| 11662662 | Photo-decomposable compound, photoresist composition including the same, and method of manufacturing integrated circuit device | Hyunji SONG, Sumin Kim, Yechan KIM, Juyoung Kim, Jinjoo KIM +3 more | 2023-05-30 |
| 11650502 | Polymer and composition for forming an anti-reflective film and method of manufacturing an integrated circuit device using the anti-reflective film | Miyeong Kang, Hyereun Kim, Jihyun Kim, Hyunjin Kim, Hyojung Roh +2 more | 2023-05-16 |