Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650502 | Polymer and composition for forming an anti-reflective film and method of manufacturing an integrated circuit device using the anti-reflective film | Miyeong Kang, Sukkoo HONG, Jihyun Kim, Hyunjin Kim, Hyojung Roh +2 more | 2023-05-16 |