Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651990 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Hunyong Park, Nohsung Kwak | 2023-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651990 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Hunyong Park, Nohsung Kwak | 2023-05-16 |