Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651990 | Substrate processing apparatus and driving method thereof | Hunyong Park, Sohee Han, Nohsung Kwak | 2023-05-16 |
| 11581202 | Substrate debonding apparatus | Kyoungran Kim, Chulhyun Park, Minjae Shin, Geunsik Oh, Hyunjin Lee +2 more | 2023-02-14 |