Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852583 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Raewon Yi, Hakseung Han | 2023-12-26 |
| 11774846 | Phase shift masks for extreme ultraviolet lithography | Dongwan KIM, Hwanseok Seo | 2023-10-03 |
| 11635371 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Raewon Yi, Hakseung Han | 2023-04-25 |