Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852583 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Raewon Yi, Seongsue Kim | 2023-12-26 |
| 11635371 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Raewon Yi, Seongsue Kim | 2023-04-25 |
| 11562477 | Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the method | Minho Kim, Jiyoung Kim, Jinback Park | 2023-01-24 |