Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658039 | Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method | Nam-Kyun Kim, Sungjun Ann, Myungsun Choi, Dougyong Sung, Seungbo Shim | 2023-05-23 |