Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658039 | Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method | Kyuho Kim, Nam-Kyun Kim, Sungjun Ann, Myungsun Choi, Seungbo Shim | 2023-05-23 |
| 11605529 | Plasma processing apparatus | Hakyoung Kim, Kyeongtea Bang | 2023-03-14 |
| 11545341 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Donghyeon Na, Seungbo Shim +3 more | 2023-01-03 |