Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702737 | Batch-type substrate processing apparatus and operation method thereof | Hee Seok Kim, Kang Lee | 2023-07-18 |
| 11587784 | Smooth titanium nitride layers and methods of forming the same | Sung Hoon Jung, Niloy Mukherjee, Hee Seok Kim, Moonsig Joo, Hae Young Kim +4 more | 2023-02-21 |