Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11565351 | Substrate processing apparatus and substrate processing method | Toshinaru SUZUKI, Dokyun KWON, Jaebum Pahk, Jinwon Baek, Jeongho Yi +1 more | 2023-01-31 |
| 11565354 | Stage for cutting substrate and substrate cutting device | Kyongho Hong, Jinwon Baek, Jeongho Yi | 2023-01-31 |