Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11565351 | Substrate processing apparatus and substrate processing method | Toshinaru SUZUKI, Dokyun KWON, Jinwon Baek, Jeongho Yi, JINPYUNG LEE +1 more | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11565351 | Substrate processing apparatus and substrate processing method | Toshinaru SUZUKI, Dokyun KWON, Jinwon Baek, Jeongho Yi, JINPYUNG LEE +1 more | 2023-01-31 |