Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720027 | Apparatus for generating extreme ultraviolet light and lithography apparatus including the same | Injae Lee, Ohkug Kwon, Sunghyup Kim, Yongchan Kim, Ouiserg Kim +4 more | 2023-08-08 |
| 11646179 | Plasma processing apparatus and plasma processing method | Jang-Yeob Lee, Sungyeol Kim, Jinyeong Yun, Minsung Kim | 2023-05-09 |