Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846391 | Gas supply apparatus | Jongkyu Kim, Hyunsik Kim, Kyeongsup Byeon, Byungjun AN, Byeongchan Jeong +2 more | 2023-12-19 |
| 11804393 | Wafer processing apparatus including equipment front end module (EFEM) and wafer processing method using the same | Jinhyuk Choi, Jonghwi Seo, Kongwoo Lee | 2023-10-31 |