Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851324 | Method for sealing entries in a MEMS element | Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold +1 more | 2023-12-26 |
| 11840445 | MEMS sensor including a diaphragm and method for manufacturing a MEMS sensor | Kerrin Doessel, Thomas Friedrich | 2023-12-12 |
| 11554952 | Method for closing openings in a flexible diaphragm of a MEMS element | Bernhard Gehl, Juergen Butz | 2023-01-17 |