Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554952 | Method for closing openings in a flexible diaphragm of a MEMS element | Christoph Hermes, Juergen Butz | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11554952 | Method for closing openings in a flexible diaphragm of a MEMS element | Christoph Hermes, Juergen Butz | 2023-01-17 |