Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846025 | Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method therefor | Masamichi YACHI | 2023-12-19 |
| 11786922 | Voltage application device and discharge device | Tetsunori Aono, Jumpei Oe, Yohei Ishigami, Kana Shimizu, Takafumi Omori +1 more | 2023-10-17 |
| 11694907 | Substrate processing apparatus, recording medium, and fluid circulation mechanism | Toshiki Fujino, Atsushi UMEKAWA | 2023-07-04 |
| 11552457 | Discharge device and method for manufacturing same | Youhei Ishigami, Masaharu Machi, Takafumi Omori, Tomohiro Yamaguchi, Osamu Imahori +2 more | 2023-01-10 |