Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846025 | Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method therefor | Takayuki Nakada | 2023-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846025 | Substrate processing apparatus capable of adjusting inner pressure of process chamber thereof and method therefor | Takayuki Nakada | 2023-12-19 |