Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556061 | Multiple charged particle beam writing apparatus and multiple charged particle beam writing method | Yasuo Kato | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556061 | Multiple charged particle beam writing apparatus and multiple charged particle beam writing method | Yasuo Kato | 2023-01-17 |