Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11812538 | Human body static electricity control device and human body static electricity control system | Ryuta OKAZAKI, Tomoyuki Kawasoe | 2023-11-07 |
| 11694882 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Kento Norota, Naoyuki Okamoto, Yasushi Yasumatsu | 2023-07-04 |
| 11603809 | Malfunction diagnostic device for leakage diagnostic device | Keiichirou Ishihara, Taiki Yasuzaka | 2023-03-14 |
| 11556061 | Multiple charged particle beam writing apparatus and multiple charged particle beam writing method | Ryoh KAWANA | 2023-01-17 |