Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11680572 | Vacuum pump and magnetic bearing controller with multiple rigidity modes at high and low gains | Yoshimasa Ezawa, Hideo Fukami | 2023-06-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11680572 | Vacuum pump and magnetic bearing controller with multiple rigidity modes at high and low gains | Yoshimasa Ezawa, Hideo Fukami | 2023-06-20 |