Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11680572 | Vacuum pump and magnetic bearing controller with multiple rigidity modes at high and low gains | Yoshimasa Ezawa, Kou Sato | 2023-06-20 |
| 11549515 | Vacuum pump, temperature adjustment controller used for vacuum pump, inspection tool, and method of diagnosing temperature-adjustment function unit | Masatoshi Ishibashi | 2023-01-10 |