Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837440 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Katsunori FUNAKI, Masaki Murobayashi, Koichiro Harada | 2023-12-05 |
| 11629772 | Valve and shock absorber | Kazuyuki KIMISHIMA, Tomohiko Baba | 2023-04-18 |
| D981970 | Substrate mounting plate for substrate processing apparatus | Tetsuaki INADA | 2023-03-28 |
| 11542999 | Valve and shock absorber | Kazuyuki Mizuno | 2023-01-03 |