Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837440 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Katsunori FUNAKI, Masaki Murobayashi | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837440 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Katsunori FUNAKI, Masaki Murobayashi | 2023-12-05 |