Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782425 | Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium | Kazuyoshi Yamamoto, Kazuhide Asai, Hidemoto Hayashihara, Kayoko Yashiki, Takayuki KAWAGISHI +1 more | 2023-10-10 |
| 11663562 | Substrate processing apparatus and controller | Risa HOSOKAWA | 2023-05-30 |
| D984288 | Inspection gauge for coordinate measuring machine | Tetsuro Hidaka, Kengo Hirata, Shingo Kiyotani, Kanae Kobayashi | 2023-04-25 |