Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782425 | Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium | Kazuyoshi Yamamoto, Kazuhide Asai, Hidemoto Hayashihara, Mitsuru Fukuda, Takayuki KAWAGISHI +1 more | 2023-10-10 |