Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Yosuke Ono, Kazuo Kohmura, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA | 2023-12-26 |