Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852968 | Pellicle, exposure master, exposure device and method for manufacturing semiconductor device | Yosuke Ono, Atsushi Okubo, Daiki Taneichi, Hisako ISHIKAWA, Tsuneaki Biyajima | 2023-12-26 |
| 11581197 | Method for producing semiconductor device and intermediate for semiconductor device | Jun Kamada, Kaichiro Haruta, Yasuhisa Kayaba, Yoichi Kodama | 2023-02-14 |