Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747728 | Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin | Junya HORIUCHI, Yu Okada, Masatoshi Echigo | 2023-09-05 |
| 11572430 | Compound, resin, resist composition or radiation-sensitive composition, resist pattern formation method, method for producing amorphous film, underlayer film forming material for lithography, composition for underlayer film formation for lithography, method for forming circuit pattern, and purification method | Takumi TOIDA, Youko Shimizu, Takashi Sato, Masatoshi Echigo | 2023-02-07 |