Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854843 | Substrate stage, substrate processing apparatus, and temperature control method | — | 2023-12-26 |
| 11587769 | Microwave output device and plasma processing apparatus | Yohei Ishida, Kazushi Kaneko, Koichi Murai | 2023-02-21 |