Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11587769 | Microwave output device and plasma processing apparatus | Kazushi Kaneko, Hajime Tamura, Koichi Murai | 2023-02-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11587769 | Microwave output device and plasma processing apparatus | Kazushi Kaneko, Hajime Tamura, Koichi Murai | 2023-02-21 |