Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789374 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yusuke Hoshino, Yukio Watanabe, Toshihiro Nishisaka, Koichiro Koge, Takayuki OSANAI +1 more | 2023-10-17 |
| 11642830 | Container sterilization method and container sterilization system | Kohichi Aoki, Daisuke Tanaka, Yasue Takeuchi, Kohichi Tamura, Takashi Minamihonoki | 2023-05-09 |