Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789374 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yukio Watanabe, Toshihiro Nishisaka, Atsushi Ueda, Koichiro Koge, Takayuki OSANAI +1 more | 2023-10-17 |