Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49602 | Lithography system, sensor and measuring method | Erwin Slot, Tijs Frans Teepen, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2023-08-08 |
| RE49488 | Lithography system, method of clamping and wafer table | Guido De Boer, Michel Pieter Dansberg | 2023-04-11 |