Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2023-09-19 |
| 11561478 | Determining subset of components of an optical characteristic of patterning apparatus | Johannes Jacobus Matheus Baselmans, Paulus Jacobus Maria VAN ADRICHEM | 2023-01-24 |