Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D980177 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Tetsuya Kosugi, Takuto Shoji | 2023-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D980177 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Tetsuya Kosugi, Takuto Shoji | 2023-03-07 |