Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D980177 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Yuya YOSHIMURA, Takuto Shoji | 2023-03-07 |
| D976129 | Temperature sensor | Tokunobu Akao | 2023-01-24 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D980177 | Ceiling heater for substrate processing apparatus | Shinobu Sugiura, Yuya YOSHIMURA, Takuto Shoji | 2023-03-07 |
| D976129 | Temperature sensor | Tokunobu Akao | 2023-01-24 |