Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749510 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2023-09-05 |
| 11553565 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | — | 2023-01-10 |