Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804365 | Substrate processing apparatus, plasma generating apparatus, and method of manufacturing semiconductor device | Daisuke Hara | 2023-10-31 |
| 11749510 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2023-09-05 |
| 11629408 | Plasma generation device, substrate processing apparatus, and method of manufacturing semiconductor device | — | 2023-04-18 |