Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817314 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2023-11-14 |
| 11664217 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2023-05-30 |