Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2023-10-24 |
| 11573077 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Aaron Rosenberg, Kai-Hsiang Lin, Dawei Hu, Zhengquan Tan | 2023-02-07 |
| 11555689 | Measuring thin films on grating and bandgap on grating | Zhengquan Tan | 2023-01-17 |