Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761880 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Pradeep Vukkadala, Haiguang Chen, Jaydeep Sinha | 2023-09-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761880 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Pradeep Vukkadala, Haiguang Chen, Jaydeep Sinha | 2023-09-19 |