Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761880 | Process-induced distortion prediction and feedforward and feedback correction of overlay errors | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan | 2023-09-19 |
| 11682570 | Process-induced displacement characterization during semiconductor production | Mark D. Smith, Ady Levy, Prasanna Dighe, Dieter Mueller | 2023-06-20 |