Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820840 | Compound, polymer, pattern forming material, and manufacturing method of semiconductor device | Koji Asakawa, Shinobu Sugimura | 2023-11-21 |
| 11796915 | Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device | Koji Asakawa, Shinobu Sugimura | 2023-10-24 |
| 11639402 | Polymer for pattern forming material | Koji Asakawa, Shinobu Sugimura | 2023-05-02 |