Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820840 | Compound, polymer, pattern forming material, and manufacturing method of semiconductor device | Norikatsu Sasao, Koji Asakawa | 2023-11-21 |
| 11796915 | Compound, polymer, pattern forming material, pattern forming method, and method of manufacturing semiconductor device | Norikatsu Sasao, Koji Asakawa | 2023-10-24 |
| 11639402 | Polymer for pattern forming material | Norikatsu Sasao, Koji Asakawa | 2023-05-02 |
| 11548208 | Template, method for manufacturing template, and pattern formation method | Koji Asakawa | 2023-01-10 |