Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651941 | Apparatus for distributing gas, and apparatus and method for processing substrate | Jong Sik Kim, Chul Joo HWANG | 2023-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651941 | Apparatus for distributing gas, and apparatus and method for processing substrate | Jong Sik Kim, Chul Joo HWANG | 2023-05-16 |